Micro- and Nanotechnology facilities

The facilities of the ICF are available for use by members of the institute as well as external users of the university and other public institutions. One focus is on the production of samples and devices. Methods such as nanostructuring using electron beam lithography, microstructuring using optical lithography, production of devices for organic electronics using wet-chemical and vacuum-based processes in glove boxes as well as evaporators for metals and organic materials are available. A clean room (260m², ISO 4 to ISO 8) is available for these methods. Another focus is on analytical methods such as various optical spectroscopy methods (IR, UV-vis, fluorescence), X-ray diffractometry, layer thickness determination and optical microscopy. The various methods are offered partly in user mode and for selected devices also in service mode.