Details
Central Laboratory for Micro- and Nanotechnology (ZMNT)


The scientific and economic relevance of micro- and nanotechnology will continue to progress at an accelerated pace in the
near and foreseeable future. In order to maintain competitiveness on a national and international scale several institutes
of the Faculty of Mathematics, Computer Science and Natural Sciences and of the Faculty of Electrical Engineering and Information
Technology at RWTH Aachen University established the "Central Laboratory for Micro- and Nanotechnology" (CMNT).
The research
infrastructure CMNT operates a central clean room facility with 500 m² of clean room space (ISO class 5), that will be extended
(until spring of 2021) by additional 625 m² of clean room space. CMNT is organized as a shared user facility and is the central
technology platform for the fabrciation of micro- and nanostructures at RWTH Aachen University. It makes a very broad set
of different fabrication tools available for external and internal users. In order to guarantee a safe and efficient operation,
CMNT provides a number of different online tools, such as an online reservation system as well as online safety training and
video tutorials for the operation of the microfabrication tools. CMNT does only allow a significantly more efficient use of
resources, but it also plays a central role in fostering the collaboration between physicists and engineers and in seeding
multi-disciplinary research. Internal and external users including industrial partners have access to a first-class research
infrastructure as well as to a broad scientific and technological knowledge base.
Address: Otto-Blumenthal-Str. 4
52074 Aachen
Nordrhein-Westfalen
Deutschland
To website
52074 Aachen
Nordrhein-Westfalen
Deutschland
To website
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Host Institution
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Scientific Domain
Primary Subjects:
- Physics
- Materials Science and Engineering
- Computer Science, Electrical and System Engineering
Secondary Subjects:
- Medicine
- Chemistry
- Mechanical and Industrial Engineering
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Category
Micro- and Nanotechnology facilities
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Scientific Services
CMNT will offer the following services:
- Access to a first-class micro- and nanotechnology platform,
- Design and fabrication
of semiconductor devices,
- Design and fabrication of nanostructures (minimum feature size approx. 10 nm),
- Design and fabrication
of photonic components and circuits,
- Electrical and optical characterization of semiconductor devices,
- Training of new
users.
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Scientific Equipment
- Micro- und nanolithography (photolithography, laser lithography, electron-beam lithography)
- Dry-chemical etching (reactive-ion etching, plasma etching)
- Chemical vapor deposition (PECVD, LPCVD)
- Atomic-layer deposition (ALD) and atomic-layer etching (ALE)
- Physical vapor deposition (electron-beam and thermal evaporation, sputtering )
- (Rapid) thermal processing (oxidation, nitridation, hydrogen, nitrogen)
- Wet-chemical processing
- Electroplating
- Chemical-mechanical polishing
- Circuit packaging (wire, chip and wafer bonding)
- Wafer dicing
- Wafer dicing (SEM, SFM, STM, optical and 3D laser microscopy, profilometry)
- Electrical transport measurements (DC, HF, I-V, (elektrochemische) C-V, Hall, room temperature, low temperature)
- (Electro-)optical characterization (Raman spectroscopy, FTIR spectroscopy, quantum efficiency, transmission, reflection, spectroscopic ellipsometry)
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Keywords
- Micro-/Nanotechnology
- Semiconductor devices
- Quantum technology
- Solid-state qubits
- Silicon technology
- Integrated silicon photonics
- Photovoltaics
- Micro- and nano-electromechanical systems (MEMS and NEMS)
- Micro systems technology
- Circuit packaging
- Group III-nitrides
- Graphene devices
- 2D Materials
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Networks
Aachen Graphene and 2D Materials Center
http://www.graphene.ac/
http://www.graphene.ac/
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Users per annum
Internal Users: zurzeit ca. 100 Nutzer
External Users in total: 6
External Users: 5
External Users in the EU: 1
External Users outside of EU: 0