Being a central institution of the University, the Center of Micro- and Nanotechnologies (ZMN) provides a platform of technologies for basic and for applied research in the field of micro and nano systems. Besides the Institute of Micro- and Nanotechnologies (IMN), all departments of the university can use this scientific infrastructure. Furthermore, the ZMN may offer services to third parties. The ZMN holds a total area of about 2000m², for example about 680m² clean rooms with various cleanroom classes (about 380 m² clean room class 10,000; 300 m² clean roomclass 1,000, and class 100 in the lithography area). Different materials are processed, e. g. pyroelectric and piezoelectric semiconductors for sensor technologies, polymers for solar cells and transistors, ceramics for hybrid techniques and the full range of silicon technology for fluidics, sensors and micro actuators. This scientific equipment is topped off by a powerful analytics department even to the points of atomic dimensions. Due to the spatial closeness of the different departments and research groups within the ZMN an intensive scientific exchange in a creative surrounding is promoted.